• Media type: E-Article
  • Title: High temporal resolution measurement of the curing process of nanometer-thick photocurable liquid films using the fiber wobbling method
  • Contributor: Itoh, Shintaro; Aratani, Kohei; Lin, Fengchang; Fukuzawa, Kenji; Azuma, Naoki; Zhang, Hedong
  • imprint: IOP Publishing, 2023
  • Published in: Applied Physics Express
  • Language: Not determined
  • DOI: 10.35848/1882-0786/ace7ad
  • ISSN: 1882-0778; 1882-0786
  • Keywords: General Physics and Astronomy ; General Engineering
  • Origination:
  • Footnote:
  • Description: <jats:title>Abstract</jats:title> <jats:p>We established a method for assessing the curing process of a nanometer-thick photocurable liquid film by monitoring changes in shear viscoelasticity at a high temporal resolution. The originally developed nano-rheometry method (the fiber wobbling method) was applied for the viscoelastic measurements. We succeeded in measuring the curing process of a 100 nm thick liquid film with a time resolution of 1 ms. The experimental results suggested that the confinement effect in the nanogap suppresses liquid curing. Thus, the proposed evaluation method can be used for developing nanoimprint lithography and high-precision 3D printing.</jats:p>