A New Chemical Mechanical Slurry for Polishing Yttrium Aluminium Garnet Material with Magnesium oxide, Sodium Metasilicate Pentahydrate and Zirconium Dioxide Abrasive Particles
You can manage bookmarks using lists, please log in to your user account for this.
Media type:
E-Article
Title:
A New Chemical Mechanical Slurry for Polishing Yttrium Aluminium Garnet Material with Magnesium oxide, Sodium Metasilicate Pentahydrate and Zirconium Dioxide Abrasive Particles
Contributor:
Duc, Le;
Hieu, Pham;
Quang, Nguyen
Published:
Wroclaw Board of Scientific Technical Societies Federation NOT, 2023
Published in:
Journal of Machine Engineering (2023)