• Media type: E-Article
  • Title: Properties of Low-Dimentional Polysilicon in SOI Structures for Low Temperature Sensors
  • Contributor: Druzhinin, Anatoly; Khoverko, Yu.; Kogut, Igor; Koretskii, R.
  • Published: Trans Tech Publications, Ltd., 2013
  • Published in: Advanced Materials Research, 854 (2013), Seite 49-55
  • Language: Not determined
  • DOI: 10.4028/www.scientific.net/amr.854.49
  • ISSN: 1662-8985
  • Keywords: General Engineering
  • Origination:
  • Footnote:
  • Description: <jats:p>The low temperature studies of SOI-structures have been carried out in a temperature range of 4.2÷300K at magnetic fields up to 14T. The samples with initial boron concentration of about 2.410<jats:sup>18</jats:sup>сm<jats:sup>-3 </jats:sup>have been investigated. The results of the studies of SOI-structure conductance at low temperatures in the range of hopping conductance and a possibility to use this material in sensors are analyzed.</jats:p>