Media type: E-Article Title: Photoluminescence of Defects Produced by Reactive Ion Etching of Silicon Contributor: Northrop, G.A.; Oehrlein, G.S. imprint: Trans Tech Publications, Ltd., 1986 Published in: Materials Science Forum Language: Not determined DOI: 10.4028/www.scientific.net/msf.10-12.1253 ISSN: 1662-9752 Keywords: Mechanical Engineering ; Mechanics of Materials ; Condensed Matter Physics ; General Materials Science Origination: Footnote: