Media type: E-Article Title: Flash Lamp Annealing of Implantation Doped p- and n-Type 6H-SiC Contributor: Panknin, D.; Gebel, T.; Skorupa, Wolfgang Published: Trans Tech Publications, Ltd., 2001 Published in: Materials Science Forum, 353-356 (2001), Seite 587-590 Language: Not determined DOI: 10.4028/www.scientific.net/msf.353-356.587 ISSN: 1662-9752 Origination: Footnote: