• Media type: E-Article
  • Title: Impact of Volume Defects on Gold Gettering in Cz-Si Wafers
  • Contributor: Kirscht, F.G.; Schmalz, K.; Babanskaya, I.
  • imprint: Trans Tech Publications, Ltd., 1989
  • Published in: Materials Science Forum
  • Language: Not determined
  • DOI: 10.4028/www.scientific.net/msf.38-41.237
  • ISSN: 1662-9752
  • Origination:
  • Footnote: