Media type: E-Article Title: Low-Temperature Thermal Oxidation of Ion-Amorphized 6H-SiC Contributor: Nipoti, Roberta; Parisini, Andrea; Poggi, Antonella imprint: Trans Tech Publications, Ltd., 2002 Published in: Materials Science Forum Language: Not determined DOI: 10.4028/www.scientific.net/msf.389-393.1109 ISSN: 1662-9752 Keywords: Mechanical Engineering ; Mechanics of Materials ; Condensed Matter Physics ; General Materials Science Origination: Footnote: