Media type: E-Article Title: Quantified Conditions for Reduction of ESO Contamination During SiC Metalization Contributor: McDaniel, G.Y.; Fenstermaker, S.T.; Walker Jr., D.E.; Lampert, W.V.; Mukhopadhyay, S.M.; Holloway, P.H. Published: Trans Tech Publications, Ltd., 2000 Published in: Materials Science Forum, 338-342 (2000), Seite 407-410 Language: Not determined DOI: 10.4028/www.scientific.net/msf.338-342.407 ISSN: 1662-9752 Origination: Footnote: