Media type: E-Article Title: Silicon Surface Cleaning after Spacer Dry Etching Contributor: Shamiryan, Denis; Baklanov, Mikhail R.; Vanhaelemeersch, Serge imprint: Trans Tech Publications, Ltd., 2001 Published in: Solid State Phenomena Language: Not determined DOI: 10.4028/www.scientific.net/ssp.76-77.303 ISSN: 1662-9779 Keywords: Condensed Matter Physics ; General Materials Science ; Atomic and Molecular Physics, and Optics Origination: Footnote: