Media type: E-Article Title: Influence of Nitrogen Gas Partial Pressure on the Properties of TiN Deposited by Reactive Sputter Deposition Contributor: NISHIMURA, Ikuya; YUHTA, Toshio; SAITOH, Tsuyoshi Published: The Surface Finishing Society of Japan, 1992 Published in: Journal of the Surface Finishing Society of Japan, 43 (1992) 6, Seite 584-588 Language: Not determined DOI: 10.4139/sfj.43.584 ISSN: 0915-1869; 1884-3409 Keywords: General Engineering Origination: Footnote: Access State: Open Access