• Media type: E-Article
  • Title: Effect of test structure on electromigration characteristics in three-dimensional through silicon via stacked devices
  • Contributor: Oba, Yoshiyuki; De Messemaeker, Joke; Tyrovouzi, Anna Maria; Miyamori, Yuichi; De Vos, Joeri; Wang, Teng; Beyer, Gerald; Beyne, Eric; De Wolf, Ingrid; Croes, Kristof
  • imprint: IOP Publishing, 2015
  • Published in: Japanese Journal of Applied Physics
  • Language: Not determined
  • DOI: 10.7567/jjap.54.05ee01
  • ISSN: 0021-4922; 1347-4065
  • Keywords: General Physics and Astronomy ; Physics and Astronomy (miscellaneous) ; General Engineering
  • Origination:
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