Media type: E-Article Title: Characteristics of Mo Thin Films Deposited by DC Magnetron Sputtering Contributor: Kong, Seon-Mi; Xiao, Yubin; Kim, Eun-Ho; Chung, Chee-Won Published: The Korean Institute of Chemical Engineers, 2011 Published in: Korean Chemical Engineering Research, 49 (2011) 2, Seite 195-199 Language: English DOI: 10.9713/kcer.2011.49.2.195 ISSN: 0304-128X Keywords: General Chemical Engineering Origination: Footnote: Access State: Open Access