Skip to contents

  1. Ullmann, Jens; Mertin, Michael; Lauth, Hans; Bernitzki, Helmut; Mann, Klaus R.; Ristau, Detlev; Arens, Winfried; Thielsch, Roland; Kaiser, Norbert

    Coated optics for DUV excimer laser application

    Conference Proceedings
    View online
    Close

    Bookmarks

    You can manage bookmarks using lists, please log in to your user account for this.

    SPIE, 2000

    Published in: SPIE Proceedings (2000)

  2. Arens, Winfried; Ristau, Detlev; Ullmann, Jens; Zaczek, Christoph; Thielsch, Roland; Kaiser, Norbert; Duparre, Angela; Apel, Oliver; Mann, Klaus R.; Lauth, Hans; Bernitzki, Helmut; Ebert, Johanes; Schippel, Stefan; Heyer, H.

    Properties of fluoride DUV excimer laser optics: influence of the number of dielectric layers

    Conference Proceedings
    View online
    Close

    Bookmarks

    You can manage bookmarks using lists, please log in to your user account for this.

    SPIE, 2000

    Published in: SPIE Proceedings (2000)