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Kaynak, Mehmet [Other]; Valenta, Václav [Other]; Schumacher, Hermann [Other]; Tillack, Bernd [Other]

MEMS module integration into SiGe BiCMOS technology for embedded system applications

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Ulm: Universität Ulm, Fakultät für Ingenieurwissenschaften und Informatik, 2013
Schumacher, Hermann [Other]; Kaynak, Mehmet [Other]; Valenta, Václav [Other]; Tillack, Bernd [Other]

Smarter ICs

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Ulm: Universität Ulm, Fakultät für Ingenieurwissenschaften und Informatik, 2013
Ulusoy, Ahmet Çağri [Other]; Kaynak, Mehmet [Other]; Purtova, Tatyana [Other]; Tillack, Bernd [Other]; Schumacher, Hermann [Other]

A 60 to 77 GHz switchable LNA in an RF-MEMS embedded BiCMOS technology

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Ulm: Universität Ulm, Fakultät für Ingenieurwissenschaften und Informatik, 2013
Kaynak, Mehmet [Other]; Purtova, Tatyana [Other]; Liu, Gang [Other]; Ulusoy, Ahmet Çağri [Other]; Tillack, Bernd [Other]; Schumacher, Hermann [Other]

Dual-band millimeter-wave VCO with embedded RF-MEMS switch module in BiCMOS technology

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Ulm: Universität Ulm, Fakultät für Ingenieurwissenschaften und Informatik, 2013
Kaynak, Mehmet [Other]; Wipf, Christian [Other]; Tillack, Bernd [Other]; Kaletta, Katrin [Other]; Suchodoletz, M. von [Other]; Zoschke, Kai [Other]; Wilke, Martin [Other]; Ehrmann, Oswin [Other]; Ulusoy, Ahmet Çağri [Other]; Purtova, Tatyana [Other]; Liu, Gang [Other]; Wietstruck, M. [Other]; Schumacher, Hermann [Other]; Zhang, W. [Other]; Drews, Jürgen [Other]; Barth, Rainer [Other]; Knoll, Dieter [Other]; Korndörfer, Falk [Other]; Scholz, René F. [Other]; Schulz, K. [Other]

Packaged BiCMOS embedded RF-MEMS switches with integrated inductive loads

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Ulm: Universität Ulm, Fakultät für Ingenieurwissenschaften und Informatik, 2013
Kaynak, Mehmet [Other]; Elkhouly, M. [Other]; Kaletta, Katrin [Other]; Suchodoletz, M. von [Other]; Zoschke, Kai [Other]; Wilke, Martin [Other]; Ehrmann, Oswin [Other]; Mühlhaus, Volker [Other]; Liu, Gang [Other]; Purtova, Tatyana [Other]; Ulusoy, Ahmet Çağri [Other]; Wietstruck, M. [Other]; Schumacher, Hermann [Other]; Tillack, Bernd [Other]; Zhang, W. [Other]; Drews, Jürgen [Other]; Scholz, René F. [Other]; Knoll, Dieter [Other]; Korndörfer, Falk [Other]; Wipf, Christian [Other]; Schulz, K. [Other]

RF-MEMS switch module in a 0.25 µm BiCMOS technology

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Ulm: Universität Ulm, Fakultät für Ingenieurwissenschaften und Informatik, 2013
Baristiran Kaynak, Canan [Author] ; Tillack, Bernd [Degree supervisor]

Characterization of Perovskite-like High k Dielectric Materials for Metal-Insulator-Metal Capacitors

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Berlin: Universitätsbibliothek der Technischen Universität Berlin, 2013
Tolunay Wipf, Selin [Author] ; Tillack, Bernd [Degree supervisor]; Tillack, Bernd [Other]; Heinrich, Wolfgang [Other]; Kallfass, Ingmar [Other]

MM-wave RF-MEMS switches in SiGe BiCMOS technologies

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Berlin: Technische Universität Berlin, 2020
Korn, Julian [Author] ; Tillack, Bernd [Degree supervisor]; Tillack, Bernd [Other]; Jungemann, Christoph [Other]; Heinrich, Wolfgang [Other]

Device simulation of high-performance SiGe heterojunction bipolar transistors

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Berlin: Technische Universität Berlin, 2018
Louriki, Latifa [Author] ; Otto, Thomas [Degree supervisor]; Otto, Thomas [Other]; Tillack, Bernd [Other]

Mikromechanischer Prozess zur Herstellung mehrlagiger 3D-MEMS (EPyC-Prozess)

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Chemnitz: Technische Universität Chemnitz, 2021
Bertoldi, W.; Tillack, Bernd

SOI-Films by Zone Melting Recrystallization of Polycrystalline Silicon

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Trans Tech Publications, Ltd., 1989

Published in: Solid State Phenomena, 6-7 (1989), Seite 507-516
Kaynak, Mehmet [Author] ; Thewes, Roland [Degree supervisor]; Tillack, Bernd [Degree supervisor]; Schumacher, Hermann [Degree supervisor]; Otto, Thomas [Degree supervisor]

RF-MEMS Switch Module in a 0.25 µm SiGe:C BiCMOS Process

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Berlin: Technische Universität Berlin, 2014
Yamamoto, Yuji; Wen, Wei-Chen; Tillack, Bernd

Heteroepitaxy of group IV materials for future device application

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IOP Publishing, 2023

Published in: Japanese Journal of Applied Physics, 62 (2023) SC, Seite SC0805
Murota, Junichi; Sakuraba, Masao; Tillack, Bernd

(Invited) Atomic-Order Thermal Nitridation of Si, Si1-xGex and Ge by NH3

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The Electrochemical Society, 2014

Published in: ECS Meeting Abstracts, MA2014-01 (2014) 36, Seite 1359-1359
Murota, Junichi; Sakuraba, Masao; Tillack, Bernd

Atomically controlled CVD processing of group IV semiconductors for ultra-large-scale integrations

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IOP Publishing, 2012

Published in: Advances in Natural Sciences: Nanoscience and Nanotechnology, 3 (2012) 2, Seite 023002
Tillack, Bernd; Yamamoto, Yuji; Murota, Junichi

Atomic Control of Doping during Si Based Epitaxial Layer Growth Processes

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The Electrochemical Society, 2010

Published in: ECS Meeting Abstracts, MA2010-02 (2010) 30, Seite 1917-1917
Murota, Junichi; Sakuraba, Masao; Tillack, Bernd

Atomically Controlled CVD Processing for Doping of Si-based Group IV Semiconductors

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The Electrochemical Society, 2009

Published in: ECS Meeting Abstracts, MA2009-02 (2009) 31, Seite 2360-2360
Yamamoto, Yuji; Köpke, Klaus; Tillack, Bernd

Selective vapor phase etching of SiGe versus Si by HCl

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Elsevier BV, 2008

Published in: Thin Solid Films, 517 (2008) 1, Seite 90-92
Murota, Junichi; Sakuraba, Masao; Tillack, Bernd

Atomically Controlled CVD Technology for Future Si-Based Devices

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The Electrochemical Society, 2006

Published in: ECS Meeting Abstracts, MA2005-01 (2006) 15, Seite 691-691
Murota, Junichi; Sakuraba, Masao; Tillack, Bernd

Atomically Controlled Processing for Group IV Semiconductors by Chemical Vapor Deposition

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IOP Publishing, 2006

Published in: Japanese Journal of Applied Physics, 45 (2006) 9R, Seite 6767

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