Bichra, Mohamed
[VerfasserIn];
Meinecke, Thomas
[VerfasserIn];
Müller, Lutz
[VerfasserIn];
Feßer, Patrick
[VerfasserIn];
Hoffmann, Martin
[VerfasserIn];
Sinzinger, Stefan
[VerfasserIn]
Innovative freeform measurement method using two dimensional binary diffractive grating based on nanostructured silicon