Kapoor, Vik J.
[HerausgeberIn];
Hankins, Kevin T.
[Sonstige Person, Familie und Körperschaft]
;
Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films 2 1986 San Diego, Calif
Proceedings of the Symposium Silicon Nitride and Silicon Dioxide Thin Insulating Films
: [held October 20 - 24, 1986, in San Diego, Calif.]