Doane, Daryl Ann
[HerausgeberIn];
Heller, Adam
[Sonstige Person, Familie und Körperschaft]
;
Electrochemical Society Dielectrics and Insulation Division,
Electrochemical Society Electronics Division
Proceedings of the Symposium on Inorganic Resist Systems
: [held May 12 - 13, 1982, in Montreal, Canada]