Beschreibung:
Nanopositioning and nanomeasuring machines are 3D coordinate measuring systems with nanometer precision at measurement volumes in the cubic centimeter range. The coordinate base is formed by an interferometer system with a common mirror corner. The orthogonality deviations of the mirror corner require a coordinate transformation of the measuring axes. The uncertainty of the coordinate transformation must be taken into account in the overall measurement uncertainty budget. Starting from a complete transformation model, the result of model simplications on the transformation behaviour is analysed and discussed.