Beschreibung:
Multidimensional positioning, measuring and manipulation with a spatial resolution in the subatomic range are an upcoming demand in the area of nanotechnology. Nanopositioning and measuring machines (NMM) enable to measure and manipulate objects within a large addressable 3D-range of up to a few hundred millimetre in each dimension with a specified spatial resolution of down to 0.1 nm [1]. New approaches are needed to extend the potential of NMM technology to even smaller scales. In previous work [2] a proof-of-concept positioning system has been designed to achieve reproducibility and resolution for precise motion on subatomic scale. In a first approach, a scanning probe microscope will be used to measure a nanosized periodic lattice that serves as a scale for the position according to [3]. Here, we present a microsystem design with an addressable positioning range of ±100 μm that will carry the lattice structure. In order to precisely control the motion, the electrostatic drive and position sensor characteristics of the demonstrator must be calibrated thoroughly by means of an optical measuring system. A focused, range-resolved fibre-optic laser interferometer is comprised as the calibration standard. An uncertainty estimation for the measurement setup is carried out. It is shown that the desired positioning accuracy for the first tip- and grating-based setup can be achieved with the presented microsystems.