• Medientyp: E-Book; Hochschulschrift
  • Titel: Detailed investigations of the sheath dynamics and elementary processes in capacitively coupled RF plasmas
  • Beteiligte: Dittmann, Kristian [VerfasserIn]
  • Erschienen: 2009
  • Umfang: Online-Ressource (PDF-Datei: 165 S., 40114 KB)
  • Sprache: Englisch
  • Identifikator:
  • Schlagwörter: Hochfrequenzplasma > Plasmarandschicht > Plasmadynamik > Atomemissionsspektroskopie
  • Entstehung:
  • Hochschulschrift: Greifswald, Univ., Diss., 2009
  • Anmerkungen: Systemvoraussetzungen: Acrobat reader
  • Beschreibung: Hochfrequenzplasma, Plasma-Wand-Wechselwirkung, Plasmadynamik, Plasmarandschicht, Kaltes Plasma

    Asymmetrical capacitively coupled RF discharges in oxygen, argon and hydrogen have been experimentally investigated with the innovative technique of the phase resolved optical emission spectroscopy. This diagnostic tool allows to measure spatio-temporally resolved emission intensities of electronically excited species with a high resolution. The spatial (axial) resolution was better than 1 mm and a temporal resolution of about 1.5 ns has been achieved. Therefore the plasma induced optical emission within the RF cycle (TRF = 73.75 ns) from the RF sheath region with a typical mean sheath thickness of about 5mm has been studied. Spatio-temporally resolved optical emission patterns of the following optical transitions have been measured for a total gas pressure in the range of 20 to 100 Pa and self-bias voltages between -50 and -550 V: Oxygen plasma Emission at 777.4 nm and 844.6 nm (atomic oxygen) Argon plasma Emission at about 751 nm and 841 nm (argon) Hydrogen plasma Emission at 656.3nm (atomic hydrogen, H alpha-line) These transitions are the most prominent ones of the investigated excited species in these plasmas as could be shown from overview spectra of the plasma induced optical emission in the range from 350 to 850 nm.
  • Zugangsstatus: Freier Zugang