IEEE Workshop on Micro Electro Mechanical Systems (1994 :Ōiso-machi, Japan),
American Society of Mechanical Engineers Dynamic Systems and Control Division,
IEEE Robotics and Automation Society,
Micromachine Center (Japan)
IEEE micro electro mechanical systems
: an investigations [sic] of micro structures, sensors, actuators, machines, and robotic systems : proceedings, Oiso, Japan, January 25-28, 1994
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Konferenzbericht
Titel:
IEEE micro electro mechanical systems
:
an investigations [sic] of micro structures, sensors, actuators, machines, and robotic systems : proceedings, Oiso, Japan, January 25-28, 1994
Weitere Titel:
Nebentitel: IEEE Micro Electro Mechanical Systems Workshop
Also known as: MEMS '94
Hersteller der Reproduktion:
[S.l.]: HathiTrust Digital Library
Reproduktionsnotiz:
Electronic reproduction
Entstehung:
Anmerkungen:
Includes bibliographical references and index
Use copy Restrictions unspecified star MiAaHDL
Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002