Erschienen in:Jülich : Forschungszentrum Jülich GmbH Zentralbibliothek, Verlag, Schriften des Forschungszentrums Jülich. Schlüsseltechnologien / Key Technologies 2, II, 165 S. (2008). = RWTH Aachen, Diss., 2008
Sprache:
Englisch
ISBN:
978-3-89336-522-7
ISSN:
1866-1807
Entstehung:
Anmerkungen:
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Beschreibung:
The aim of the present work is twofold. A method for the preparation of lithography nanotemplates, which will be used for fabrication of ordered magnetic nanostructures on a large surface area (more than 1 × 1 cm$^{2}$), was probed. The structural analysis of obtained nanotemplates was made by atomic force microscopy (AFM), grazing incidence small angle scattering (GISAS) and neutron reflectometry. A comparison of these techniques, simulations of GISAS patterns by Distorted Wave Born Approximation (DWBA) and description of instrumental smearing effects are given in this work in detail. Self-organized deuterated polystyrene-polybutadiene (dPS-PB) diblock copolymer thin films were used for nanotemplate fabrication. Microphase separated blocks can form different type of structures, such as lamellae, lying or standing cylinders, spheres, etc., depending on different parameters of the polymer. Thin polymer films were prepared by spin-coating of the polymer solutions in toluenewith different concentrations. We obtained samples with different thicknesses from 25 nm to 500 nm. Investigation of thin films by AFM and scattering techniques show that surface tension effects play an important role in the formation of nanostructures on the surface and in the interior of the polymer film. Neutron reflectivity measurements of the lamellar phase sample show that near the thin film surface the layer has a complex averaged structure which cannot be described by a homogeneous layer with roughness described by an error-function. The layer with perpendicular lamellae is formed on top of a Si substrate with a native oxide. The average period between lamellae was found by AFM and GISANS. The samples with cylindrical phase were investigated by AFM, GISAXS and GISANS technique. We prepared thin polymer films with different thicknesses; cylinders of (d)PS block, lying parallel to the substrate, always formed layers with hexagonal stacking in PB matrix, excluding the sample which thickness equal or less than the period of the structure. ...