Erschienen in:Jülich : Forschungszentrum Jülich GmbH Zentralbibliothek, Verlag, Scientific series of the International Bureau 17, 40 S. (1993).
Sprache:
Englisch
ISBN:
3-89336-115-4
ISSN:
0938-7676
Entstehung:
Anmerkungen:
Diese Datenquelle enthält auch Bestandsnachweise, die nicht zu einem Volltext führen.
Beschreibung:
Despite of the fact that the existing literature covering the last two decades is plentiful with data related to CVD, this is an attempt to provide to a reader a concise information about the nature of CVD technique at production of technologically important materials as well as to point atspecial references. At the same time this is both review and overview on problems appearing at every CVD technique in current applications. The text is devided into three separate sections. Every section represents a particular integrated unity treating, in common, closely relatedtopics. The first section, The Main Features of CVD, is intended to give a complete comprehensive picture of the CVD technique through process description and characterization. The basic principles of thermodynamics, CVD chemical reactions classification, CVD chemical kinetics aspects andphysics of CVD (with particular attention on the gas-flow phenomena) are included. As an additional aspect, in CVD unavoidable aspect however, the role of the coating/substrate compatibility on the overall process was outlined. The second section, CVD Equipment, concerns on the pecularities ofthe complete CVD unit pointing out the individual significances of the separate parts, i.e. pumping system, reactor chamber, control system. The aim of this section is to create to a reader a basic understanding of the arising problems but connected to the actual CVD performance .As a final goal of this review the reader's attention is turned upon the CVD applications for production of an up-to-date important class of coatings such as multilayer coatings. All over the elaborated material the main points of the always present and carefully inspected question in relation to "advantage/disadvantage" of CVD were revealed. Extensive study of the related literature (references, reviews, monographies) has been made to provide the base in preparing this booklet. It is believed that not only an overview of CVD techniques but also anintroduction to the basic principles upon which CVD ...