• Medientyp: E-Artikel
  • Titel: Evidence of 2D intersubband scattering in thin film fully depleted silicon-on-insulator transistors operating at 4.2 K
  • Beteiligte: Cassé, Mikaël; Cardoso Paz, Bruna; Ghibaudo, Gérard; Poiroux, Thierry; Vincent, Emmanuel; Galy, Philippe; Juge, André; Gaillard, Fred; de Franceschi, Silvano; Meunier, Tristan; Vinet, Maud
  • Erschienen: AIP Publishing, 2020
  • Erschienen in: Applied Physics Letters
  • Sprache: Englisch
  • DOI: 10.1063/5.0007100
  • ISSN: 1077-3118; 0003-6951
  • Schlagwörter: Physics and Astronomy (miscellaneous)
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  • Beschreibung: <jats:p>We report the observation at low temperature of a hump in the linear transfer characteristic of a thin film fully depleted silicon-on-insulator transistor when a positive bias is applied on the back gate under the buried oxide. This decrease in the current is correlated with the transition from one-subband to two-subband conduction. Electron mobility measurements and calculations are in good agreement with the occurrence of intersubband scattering in carrier transport in the two-dimensional inversion layer.</jats:p>