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Medientyp:
E-Artikel
Titel:
Pressure-enhanced solid phase epitaxy of germanium
Beteiligte:
Lu, G. Q.;
Nygren, E.;
Aziz, M. J.;
Turnbull, D.;
White, C. W.
Erschienen:
AIP Publishing, 1990
Erschienen in:Applied Physics Letters
Sprache:
Englisch
DOI:
10.1063/1.103053
ISSN:
0003-6951;
1077-3118
Entstehung:
Anmerkungen:
Beschreibung:
<jats:p>We have measured the effect of pressure on the solid phase epitaxial growth rate of Ge(100) into self-implanted amorphous Ge by using in situ time-resolved infrared interferometry in a high-temperature, high-pressure diamond anvil cell. In the temperature range 300–365 °C, a rate enhancement of more than a factor of 100 over that at ambient pressure has been observed due to hydrostatic pressures of up to 5.2 GPa (52 kbar). The pressure enhancement is characterized by a negative activation volume of −6.2±0.6 cm3/mol (−45% of the atomic volume), which is of the same sign but greater in magnitude than we found in Si. We conclude that the defects controlling the solid phase epitaxy of Ge cannot be vacancies in the crystal, that mechanisms based on other point defects migrating to the interface from either phase are unlikely, and that mechanisms based on point defects residing in the interface are plausible.</jats:p>