Beschreibung:
<jats:p>We present results on the effect of carbon coevaporation by molecular beam epitaxy on electrical properties of highly boron doped SiGe:C layers for C concentration of around 1020 cm−3. Such C concentrations are needed for substantial suppression of boron outdiffusion. The concentration of electrically active boron and the hole mobility are not affected by the addition of carbon. Carbon-related defects, typically observed for C concentrations below the bulk solid solubility limit (&lt;1018 cm−3), do not significantly reduce the concentration of electrically active B in SiGe:C. However, carbon coevaporation affects carrier lifetimes. The generation lifetime is reduced by more than one order of magnitude in SiGe:C compared with analogous SiGe layers.</jats:p>