Beschreibung:
<jats:p>Fabricated by femtosecond laser pulses at wavelength λ of 780nm, the feature size of two-photon polymerization using SCR500 was reduced to λ∕50. Lines with sub-25-nm width were produced by controlling the incident laser power and the laser focus scan speed up to 700μm∕s. Based on repolymerization between two structures close to each other, the feature size was further reduced to ∼15nm, which demonstrated the potential for three-dimensional nanofabrication with high spatial resolution.</jats:p>