• Medientyp: E-Artikel
  • Titel: Microwave dielectric constants of silicon, gallium arsenide, and quartz
  • Beteiligte: Seeger, Karlheinz
  • Erschienen: AIP Publishing, 1988
  • Erschienen in: Journal of Applied Physics
  • Sprache: Englisch
  • DOI: 10.1063/1.341153
  • ISSN: 0021-8979; 1089-7550
  • Schlagwörter: General Physics and Astronomy
  • Entstehung:
  • Anmerkungen:
  • Beschreibung: <jats:p>For a determination of the dielectric constants ε of semiconductors, a microwave transmission interference method has been applied. For the first time, a calculation is presented which yields the full interference spectrum, not only the position of the extremal points. A comparison of the theoretical and experimental spectra results in a higher precision than previously obtained. A metal evaporation of the sample faces which are in contact with the waveguide walls turns out to be very important. Relative dielectric constants of 11.6 for silicon, 12.8 for gallium arsenide, and 4.6 for crystalline quartz, all ±0.05, have been obtained.</jats:p>