Fabrication of an SU-8 based microfluidic reactor on a PEEK substrate sealed by a flexible semi-solid transfer (FST) process

Medientyp: E-Artikel
Titel: Fabrication of an SU-8 based microfluidic reactor on a PEEK substrate sealed by a flexible semi-solid transfer (FST) process
Beteiligte: Song, Yujun; Kumar, Challa S S R; Hormes, Josef
Erschienen: IOP Publishing, 2004
Erschienen in: Journal of Micromechanics and Microengineering
Sprache: Nicht zu entscheiden
DOI: 10.1088/0960-1317/14/7/013
ISSN: 0960-1317; 1361-6439
Schlagwörter: Electrical and Electronic Engineering ; Mechanical Engineering ; Mechanics of Materials ; Electronic, Optical and Magnetic Materials
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