Beschreibung:
<jats:sec><jats:label /><jats:p>The presence of a 2D electron gas (2DEG) in GaN/Al<jats:sub><jats:italic>x</jats:italic></jats:sub>Ga<jats:sub>1–<jats:italic>x</jats:italic></jats:sub>N heterostructures with low aluminum mole fraction is found to depend on the residual background impurity concentration in the GaN/AlGaN layer stack. At a residual donor level of 2 × 10<jats:sup>16</jats:sup> cm<jats:sup>−3</jats:sup>, a 2DEG is absent at 300 K in dark environment. Such a 2DEG can be generated at the GaN/AlGaN interface either by illumination with ultraviolet light or by applying an electrostatic potential. The latter results in inherently normally‐off switching characteristics of lateral field‐effect transistors.</jats:p></jats:sec>