The stress and microstructure of a‐C multilayers deposited using a filtered cathodic vacuum arc and periodic substrate bias

Medientyp: E-Artikel
Titel: The stress and microstructure of a‐C multilayers deposited using a filtered cathodic vacuum arc and periodic substrate bias
Beteiligte: Xiao, Xiaoling; Partridge, Jim; Taylor, Matthew; McCulloch, Dougal
Erschienen: Wiley, 2009
Erschienen in: physica status solidi c, 6 (2009) 10, Seite 2179-2183
Sprache: Englisch
DOI: 10.1002/pssc.200881704
ISSN: 1862-6351; 1610-1642
Schlagwörter: Condensed Matter Physics
Entstehung:
Anmerkungen:
Beschreibung: <jats:title>Abstract</jats:title><jats:p>Graded amorphous carbon (a‐C) multilayers have been fabricated at room temperature using a filtered ca‐thodic vacuum arc deposition system. The average incident energy of the carbon ions was varied through‐out the deposition process by applying a sinusoidal substrate bias voltage. After deposition, the micro‐structure of the coatings was investigated using transmission electron microscopy and electron energy loss spectroscopy. The evolution of the density and microstructure in the multilayer a‐C films was explained by the depth dependent variation in stress, resulting from the time dependent ion energy. Low density lay‐ers containing graphitic planes oriented perpendicular to the substrate, were found to form during pauses in deposition. This preferred orientation can be explained by surface relaxation in the presence of a biaxial stress field. (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)</jats:p>

Nur in Feld suchen: