Wafer particle inspection technique using computer vision based on a color space transform model

Medientyp: E-Artikel
Titel: Wafer particle inspection technique using computer vision based on a color space transform model
Beteiligte: Chun, Heebum; Wang, Jingyan; Kim, Jungsub; Lee, ChaBum
Erschienen: Springer Science and Business Media LLC, 2023
Erschienen in: The International Journal of Advanced Manufacturing Technology, 127 (2023) 11-12, Seite 5063-5071
Sprache: Englisch
DOI: 10.1007/s00170-023-11888-y
ISSN: 0268-3768; 1433-3015
Schlagwörter: Industrial and Manufacturing Engineering ; Computer Science Applications ; Mechanical Engineering ; Software ; Control and Systems Engineering
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