Investigation of voltage-swing effect and trap generation in high-k gate dielectric of MOS devices by charge-pumping measurement

Medientyp: E-Artikel
Titel: Investigation of voltage-swing effect and trap generation in high-k gate dielectric of MOS devices by charge-pumping measurement
Beteiligte: Lu, Chun-Yuan; Chang-Liao, Kuei-Shu; Lu, Chun-Chang; Tsai, Ping-Hung; Kyi, Yin Yin; Wang, Tien-Ko
Erschienen: Elsevier BV, 2008
Erschienen in: Microelectronic Engineering
Sprache: Englisch
DOI: 10.1016/j.mee.2007.02.012
ISSN: 0167-9317
Schlagwörter: Electrical and Electronic Engineering ; Surfaces, Coatings and Films ; Condensed Matter Physics ; Atomic and Molecular Physics, and Optics ; Electronic, Optical and Magnetic Materials
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