Optical characterization of anatase TiO2 films patterned by direct ultraviolet-assisted nanoimprint lithography

Medientyp: E-Artikel
Titel: Optical characterization of anatase TiO2 films patterned by direct ultraviolet-assisted nanoimprint lithography
Beteiligte: Park, Hyeong-Ho; Zhang, Xin; Lee, Soon-Won; Jeong, Dong-Joo; Lee, Sang-Moo; Kim, Ki-don; Choi, Dae-Geun; Choi, Jun-Hyuk; Lee, Jihye; Lee, Eung-Sug; Kang, Ho Kwan; Park, Hyung-Ho; Hill, Ross H.; Jeong, Jun-Ho
Erschienen: Elsevier BV, 2011
Erschienen in: Microelectronic Engineering
Sprache: Englisch
DOI: 10.1016/j.mee.2010.12.018
ISSN: 0167-9317
Schlagwörter: Electrical and Electronic Engineering ; Surfaces, Coatings and Films ; Condensed Matter Physics ; Atomic and Molecular Physics, and Optics ; Electronic, Optical and Magnetic Materials
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