Development and test of model apparatus of non-contact spin processor for photo mask production applying radial-type superconducting magnetic bearing

Medientyp: E-Artikel
Titel: Development and test of model apparatus of non-contact spin processor for photo mask production applying radial-type superconducting magnetic bearing
Beteiligte: Saito, Kimiyo; Fukui, Satoshi; Maezawa, Masaru; Ogawa, Jun; Oka, Tetsuo; Sato, Takao
Erschienen: Elsevier BV, 2013
Erschienen in: Physica C: Superconductivity
Sprache: Englisch
DOI: 10.1016/j.physc.2012.03.008
ISSN: 0921-4534
Schlagwörter: Electrical and Electronic Engineering ; Energy Engineering and Power Technology ; Condensed Matter Physics ; Electronic, Optical and Magnetic Materials
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