Belot, John A.;
Neumayer, Deborah A.;
Reedy, Charles J.;
Studebaker, Daniel B.;
Hinds, Bruce J.;
Stern, Charlotte L.;
Marks, Tobin J.
Volatility by Design. Synthesis and Characterization of Polyether Adducts of Bis(1,1,1,5,5,5-hexafluoro-2,4-pentanedionato)barium and Their Implementation as Metal−Organic Chemical Vapor Deposition Precursors
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Medientyp:
E-Artikel
Titel:
Volatility by Design. Synthesis and Characterization of Polyether Adducts of Bis(1,1,1,5,5,5-hexafluoro-2,4-pentanedionato)barium and Their Implementation as Metal−Organic Chemical Vapor Deposition Precursors
Beteiligte:
Belot, John A.;
Neumayer, Deborah A.;
Reedy, Charles J.;
Studebaker, Daniel B.;
Hinds, Bruce J.;
Stern, Charlotte L.;
Marks, Tobin J.
Erschienen:
American Chemical Society (ACS), 1997
Erschienen in:
Chemistry of Materials, 9 (1997) 7, Seite 1638-1648