Erschienen:
Royal Society of Chemistry (RSC), 2017
Erschienen in:
RSC Advances, 7 (2017) 25, Seite 15596-15612
Sprache:
Englisch
DOI:
10.1039/c6ra27070k
ISSN:
2046-2069
Entstehung:
Anmerkungen:
Beschreibung:
In this study, a series of large-scale molecular dynamics simulations have been performed to study the nanometric cutting of single crystal silicon with a laser-fabricated nanostructured diamond tool.