A MEMS-Assisted Temperature Sensor With 20- $\mu \text{K}$ Resolution, Conversion Rate of 200 S/s, and FOM of 0.04 pJK2

Medientyp: E-Artikel
Titel: A MEMS-Assisted Temperature Sensor With 20- $\mu \text{K}$ Resolution, Conversion Rate of 200 S/s, and FOM of 0.04 pJK2
Beteiligte: Heidarpour Roshan, Meisam; Zaliasl, Samira; Joo, Kimo; Souri, Kamran; Palwai, Rajkumar; Chen, Lijun Will; Singh, Amanpreet; Pamarti, Sudhakar; Miller, Nicholas J.; Doll, Joseph C.; Arft, Carl; Tabatabaei, Sassan; Sechen, Carl; Partridge, Aaron; Menon, Vinod
Erschienen: Institute of Electrical and Electronics Engineers (IEEE), 2017
Erschienen in: IEEE Journal of Solid-State Circuits
Sprache: Nicht zu entscheiden
DOI: 10.1109/jssc.2016.2621035
ISSN: 0018-9200; 1558-173X
Schlagwörter: Electrical and Electronic Engineering
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