Investigation of Low-Temperature Hydrogen Plasma-Etching Processes for Silicon Wafer Solar Cell Surface Passivation in an Industrial Inductively Coupled Plasma Deposition Tool

Medientyp: E-Artikel
Titel: Investigation of Low-Temperature Hydrogen Plasma-Etching Processes for Silicon Wafer Solar Cell Surface Passivation in an Industrial Inductively Coupled Plasma Deposition Tool
Beteiligte: Tang, Muzhi; Ge, Jia; Wong, Johnson; Liu, Zhe; Dippell, Torsten; Zhang, Zhenhao; Huber, Marco; Doerr, Manfred; Hohn, Oliver; Wohlfart, Peter; Aberle, Armin G.; Mueller, Thomas
Erschienen: Institute of Electrical and Electronics Engineers (IEEE), 2016
Erschienen in: IEEE Journal of Photovoltaics, 6 (2016) 1, Seite 10-16
Sprache: Nicht zu entscheiden
DOI: 10.1109/jphotov.2015.2481607
ISSN: 2156-3381; 2156-3403
Schlagwörter: Electrical and Electronic Engineering ; Condensed Matter Physics ; Electronic, Optical and Magnetic Materials
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