Vacuum-sealed field emission electron gun

Medientyp: E-Artikel
Titel: Vacuum-sealed field emission electron gun
Beteiligte: Bachmann, Michael; Düsberg, Felix; Langer, Christoph; Herdl, Florian; Bergbreiter, Lukas; Dams, Florian; Miyakawa, Natuski; Eggert, Tobias; Pahlke, Andreas; Edler, Simon; Prommesberger, Christian; Ławrowski, Robert; Hausladen, Matthias; Schreiner, Rupert
Erschienen: American Vacuum Society, 2020
Erschienen in: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Sprache: Englisch
DOI: 10.1116/1.5139316
ISSN: 2166-2746; 2166-2754
Schlagwörter: Materials Chemistry ; Electrical and Electronic Engineering ; Surfaces, Coatings and Films ; Process Chemistry and Technology ; Instrumentation ; Electronic, Optical and Magnetic Materials
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Beschreibung: <jats:p>A compact vacuum-sealed field emission electron gun with an operation voltage below 5 kV is presented. With a 150 nm thick pyrolytic carbon membrane, a transmission of 40% at 5 kV is obtained. For more than 2500 h of continuous operation at an emission current of 100 nA, no significant increase (&lt;50V) and almost no degradation were found. From this measurement, a lifetime of more than 10 000 h at continuous operation with approximately a linear increase of the extraction voltage from about 545 V to about 730 V is predicted. This electron source enables application of field emitter arrays in poor vacuum or even ambient pressure.</jats:p>

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