Beschreibung:
<jats:p>During the past two decades a considerable effort has been made to develop
radio-frequency (RF) resonators which are fabricated using the
micro/nanoelectro-mechanical systems (MEMS/NEMS) technologies, in order to
replace conventional large off-chip components in wireless transceivers and
other high-speed electronic systems. The first part of the paper presents an
overview of RF MEMS and NEMS resonators, including those based on
two-dimensional crystals (e.g. graphene). The frequency tuning in MEMS/NEMS
resonators is then analyzed. Improvements that would be necessary in order
for MEMS/NEMS resonators to meet the requirements of wireless systems are
also discussed. The analysis of noise of RF MEMS/NEMS resonators and
oscillators is especially important in modern wireless communication systems
due to increasingly stringent requirements regarding the acceptable noise
level in every next generation. The second part of the paper presents the
analysis of adsorption-desorption (AD) noise in RF MEMS/NEMS resonators,
which becomes pronounced with the decrease of components' dimensions, and is
not sufficiently elaborated in the existing literature about such components.
Finally, a theoretical model of phase noise in RF MEMS/NEMS oscillators will
be presented, with a special emphasize on the influence of the resonator AD
noise on the oscillator phase noise.</jats:p>