Beschreibung:
<jats:p>The correlation between structural properties of Al-rich self-assembled nano-lamellar AlxTi1−xN coatings and process parameters used during their chemical vapor deposition (CVD) remains unexplored. For this article, two gradient AlxTi1−xN coatings were prepared by a stepwise increase in temperature and pressure in the ranges of 750–860 °C and 1.56 to 4.5 kPa during the depositions at a constant composition of the process gas mixture. The cross-sectional properties of the coatings were analyzed using X-ray nanodiffraction (CSnanoXRD) and electron microscopy. Experimental results indicate that the variation of the process parameters results in changes in microstructure, grain morphology, elastic strain, nanolamellae’s chemistry and bi-layer period. At temperatures of ~750–800 °C and pressures of 2.5–4.5 kPa, preferably cubic nanolamellar grains are formed, whose microstructure correlates with the build-up of tensile stresses, which become relaxed in coating regions filled with nanocrystalline grains. CSnanoXRD superlattice satellite reflections indicate the period of the cubic Al(Ti)N-Ti(Al)N bilayers, which changes from 6.7 to 9 nm due to the temperature increase from 750 to ~810 °C, while it remains nearly unaffected by the pressure variation. In summary, our study documents that CVD process parameters can be used to tune microstructural properties of self-assembled AlxTi1−xN nanolamellae as well as the coatings’ grain morphology.</jats:p>