Beschreibung:
<jats:p>According to the characteristics of probe motion of Amplitude Modulation Atomic Force Microscopy (AM-AFM), the model of AM-AFM probe dynamic process is obtained through Euler - Bernoulli's equation. Based on AM-AFMs negative feedback control system with a fuzzy PID control module, a complete AM-AFM system simulation platform is established. By using fuzzy system, fuzzy PID controller makes the real-time adjustment of PID parameters come true, that is, this method overcomes the difficulties of traditional PID parameter tuning and thus high-quality control effect is achieved. Moreover, this article got a set of initial value of off-line adjustment using Ziegler-Nichols method. The value is applied in the setting of fuzzy center so as to further improve the control effect. The simulation of the scanning of two typical samples is made to demonstrate the control effect of fuzzy PID. It proves the control effect of fuzzy PID and indicates that fuzzy PID can significantly improve the AM-AFM image quality of samples which have steep surface.</jats:p>