Beschreibung:
<jats:p>Recently a great deal of attention has been devoted to sputtering technology for nanostructured
coatings. Wear resistant nanocomposite coatings are very promising materials, which can
be easily scaled up for industrial production. Therefore, reactive magnetron sputtering of alloy
targets or co-sputtering of elemental metal targets are now intensively investigated. Present paper
presents some results of our research work for optimization of tribological properties by definition
of selected parameters for reactive sputtering process conditions of self-lubricated carbon doped
TiAlN coating. Tailored nanocomposite thin films of multicomponent and multiphase materials
have been performed by DC reactive UM magnetron co-sputtering of TiAl and TiC target materials
in Ar–N2 respectively C2H2 and CH4 as carbon precursor gases.</jats:p>