Beschreibung:
<jats:p>The paper studies the effect of technological parameters of the deposition process from the gas phase to the thickness of the carbon layers and their functional characteristics. Graphene and graphite layers have been synthesized by varying total pressure, methane partial pressure and temperature of synthesis. The synthesized films demonstrate an absorption in the range from 4.4% to 99.5% and electrical resistivity varying from 0.14 to 2 kΩ/sq. The obtained results make possible controllable synthesis of carbon films with specified characteristics for use as a photodetectors.</jats:p>