Beschreibung:
<jats:p>The work of nanoindentation approach is developed and applied for measure of
residual stress relaxation during indenter penetrates in thin films. The residual stress at given penetration depth is measured from the different integral area which under load-depth curve of different stress state. This method can measure residual stress relaxation without the need for estimating yield strength, strain hardening index and hardness.</jats:p>