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  1. Campbell, S. A. [Editor]

    Semiconductor micromachining

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    Chichester; Weinheim [u.a.]: Wiley, 19XX-

  2. Lyshevski, Sergey Edward [Author]

    MEMS and NEMS : systems, devices, and structures

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    Boca Raton, FL: CRC Press, 2002

    Published in: Nano- and microscience, engineering, technology, and medicine series

  3. Zhang, Tianhao [Author]; Chakrabarty, Krishnendu [Author]; Fair, Richard B. [Author]

    Microelectrofluidic systems : modeling and simulation

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    Boca Raton, Fla. [u.a.]: CRC Press, 2002

    Published in: Nano- and microscience, engineering, technology, and medicine series

  4. Dötzel, W. [Other]; Dötzel, Wolfram [Other] ; Technische Universität Chemnitz, Chemnitzer Fachtagung Mikromechanik & Mikroelektronik 5 2001 Chemnitz

    Mikro-System-Technik Chemnitz '01 : Mikromechanik & Mikroelektronik

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    Chemnitz: Techn. Univ. Chemnitz, Fak. für Elektrotechnik und Informationstechnik, 2001

  5. Gasman, Lawrence [Author]

    Nanotechnology applications and markets

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    Boston, Mass. [u.a.]: Artech House, c 2006

    Published in: Artech House nanotechnology library

  6. Sedky, Sherif [Author]

    Post-processing techniques for integrated MEMS

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    Boston, Mass.; London: Artech House, c2006

    Published in: Artech House microelectromechanical systems series

  7. Schlaak, Helmut F. [Other]; Schlaak, Helmut [Adapter] ; Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik, Workshop Technologien und Werkstoffe der Mikro- und Nanosystemtechnik 2007 Karlsruhe

    Technologien und Werkstoffe der Mikro- und Nanosystemtechnik : GMM-Workshop vom 7. bis 8. Mai in Karlsruhe

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    Berlin; Offenbach: VDE, 2007

    Published in: Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik: GMM-Fachbericht ; 53

  8. Fujita, Hiroyuki [Editor]

    Micromachines as tools for nanotechnology

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    Berlin; Heidelberg [u.a.]: Springer, 2003

    Published in: Microtechnology and MEMS- Physics and astronomy online library