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  1. Jones, Anthony C. [Other]; Hitchman, Michael L. [Other]; Ritala, Mikko [Other]; Niinisto, Jaako [Other]; Krumdieck, Susan [Other]; Chalker, Paul [Other]; Aspinall, Helen C. [Other]; Pemble, Martyn E. [Other]; Gladfelter, W.L [Other]; Leese, Barry [Other]

    Chemical vapour deposition : Precursors, processes and applications

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    Cambridge: Royal Society of Chemistry, 2008