Media type: Book Title: Handbook of microlithography, micromachining, and microfabrication / P. Rai-Choudhury, ed 1, Microlithography imprint: Bellingham, Wash.: SPIE Optical Engineering Pr., 1997 Published in: Handbook of microlithography, micromachining, and microfabrication / P. Rai-Choudhury, ed. ; 1 Institution of Electrical Engineers: IEE materials and devices series ; 12 SPIE: SPIE press monograph ; 39 Extent: VIII, 768 S.; graph. Darst Language: English ISBN: 0819423785; 0852969066 RVK notation: ZN 4170 : Fotolithographie; Maskierung (Elektronenstrahllithographie; Röntgenstrahllithographie) ZM 9000 : Allgemeines Keywords: Lithografie Origination: Footnote:
Departmental Library DrePunct – open access area Shelf-mark: ZN 4170 R149-1 Item ID: 10361783 Status: Loanable
Bestand der TU Dresden Shelf-mark: 2007 4 006467 Item ID: 10732185N Status: Verfügbarkeit bitte in Biotechnologisches Zentrum BIOTEC erfragen.