Media type: Book; Conference Proceedings Title: Introduction to microlithography Contributor: Thompson, Larry F. [Editor] Published: Washington, DC: American Chemical Soc., 1994 Published in: ACS professional reference book Issue: 2. ed. Extent: XIV, 527 S; Ill., graph. Darst Language: English ISBN: 0841228485 RVK notation: ZN 4170 : Fotolithographie; Maskierung (Elektronenstrahllithographie; Röntgenstrahllithographie) Keywords: Halbleitertechnologie > Lithografie > Photoresist > Plasmaätzen Origination: Footnote: Literaturangaben
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